Recent Advances in Nanofabrication Techniques and Applications (Record no. 48365)

MARC details
000 -LEADER
fixed length control field 02244naaaa2200301uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/65337
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220219223550.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 859
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789533076027
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535155546
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.5772/859
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
072 #7 - SUBJECT CATEGORY CODE
Subject category code PHFC
Source bicssc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Cui, Bo
Relationship edt
245 10 - TITLE STATEMENT
Title Recent Advances in Nanofabrication Techniques and Applications
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. IntechOpen
Date of publication, distribution, etc. 2011
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (628 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction Creative Commons
Use and reproduction rights https://creativecommons.org/licenses/by/3.0/
Source of term cc
-- https://creativecommons.org/licenses/by/3.0/
546 ## - LANGUAGE NOTE
Language note English
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Condensed matter physics (liquid state & solid state physics)
Source of heading or term bicssc
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Condensed matter physics (liquid state & solid state physics)
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Cui, Bo
Relationship oth
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://mts.intechopen.com/storage/books/334/authors_book/authors_book.pdf">https://mts.intechopen.com/storage/books/334/authors_book/authors_book.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/65337">https://directory.doabooks.org/handle/20.500.12854/65337</a>
Access status 0
Public note DOAB: description of the publication

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