Ion Implantation - Research and Application (Record no. 49044)

MARC details
000 -LEADER
fixed length control field 01973naaaa2200313uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/50661
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220219224932.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 65528
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535132387
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535132370
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.5772/65528
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Ishaq Ahmad
Relationship auth
245 10 - TITLE STATEMENT
Title Ion Implantation - Research and Application
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. IntechOpen
Date of publication, distribution, etc. 2017
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (152 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction All rights reserved
-- http://oapen.org/content/about-rights
546 ## - LANGUAGE NOTE
Language note English
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Physical Sciences
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Engineering and Technology
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Materials Science
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Thermal Engineering
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Metals and Nonmetals
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://www.intechopen.com/books/ion-implantation-research-and-application">https://www.intechopen.com/books/ion-implantation-research-and-application</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/50661">https://directory.doabooks.org/handle/20.500.12854/50661</a>
Access status 0
Public note DOAB: description of the publication

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