Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry (Record no. 53341)

MARC details
000 -LEADER
fixed length control field 02455naaaa2200373uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/74907
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220220001840.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 978-3-658-35926-3
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783658359263
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1007/978-3-658-35926-3
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
072 #7 - SUBJECT CATEGORY CODE
Subject category code PHJ
Source bicssc
072 #7 - SUBJECT CATEGORY CODE
Subject category code PDDM
Source bicssc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Taudt, Christopher
Relationship auth
245 10 - TITLE STATEMENT
Title Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Bern
Name of publisher, distributor, etc. Springer Nature
Date of publication, distribution, etc. 2022
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (163 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction Creative Commons
Use and reproduction rights by/4.0/
Source of term cc
-- http://creativecommons.org/licenses/by/4.0/
546 ## - LANGUAGE NOTE
Language note English
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Optical physics
Source of heading or term bicssc
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Mensuration & systems of measurement
Source of heading or term bicssc
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term surface metrology
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Uncontrolled term profilometry
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Uncontrolled term interferometry
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Uncontrolled term low-coherence interferometry
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Uncontrolled term semiconductor manufacturing
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Uncontrolled term optical metrology
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Open Access
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf">https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/74907">https://directory.doabooks.org/handle/20.500.12854/74907</a>
Access status 0
Public note DOAB: description of the publication

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