Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry (Record no. 53341)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02455naaaa2200373uu 4500 |
| 001 - CONTROL NUMBER | |
| control field | https://directory.doabooks.org/handle/20.500.12854/74907 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220220001840.0 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 978-3-658-35926-3 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783658359263 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1007/978-3-658-35926-3 |
| Terms of availability | doi |
| 041 0# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | English |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | dc |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | PHJ |
| Source | bicssc |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | PDDM |
| Source | bicssc |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Taudt, Christopher |
| Relationship | auth |
| 245 10 - TITLE STATEMENT | |
| Title | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bern |
| Name of publisher, distributor, etc. | Springer Nature |
| Date of publication, distribution, etc. | 2022 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 electronic resource (163 p.) |
| 506 0# - RESTRICTIONS ON ACCESS NOTE | |
| Terms governing access | Open Access |
| Source of term | star |
| Standardized terminology for access restriction | Unrestricted online access |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. |
| 540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE | |
| Terms governing use and reproduction | Creative Commons |
| Use and reproduction rights | by/4.0/ |
| Source of term | cc |
| -- | http://creativecommons.org/licenses/by/4.0/ |
| 546 ## - LANGUAGE NOTE | |
| Language note | English |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Optical physics |
| Source of heading or term | bicssc |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Mensuration & systems of measurement |
| Source of heading or term | bicssc |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | surface metrology |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | profilometry |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | interferometry |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | low-coherence interferometry |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | semiconductor manufacturing |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | optical metrology |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Open Access |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Host name | www.oapen.org |
| Uniform Resource Identifier | <a href="https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf">https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf</a> |
| Access status | 0 |
| Public note | DOAB: download the publication |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Host name | www.oapen.org |
| Uniform Resource Identifier | <a href="https://directory.doabooks.org/handle/20.500.12854/74907">https://directory.doabooks.org/handle/20.500.12854/74907</a> |
| Access status | 0 |
| Public note | DOAB: description of the publication |
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