Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices (Record no. 58211)

MARC details
000 -LEADER
fixed length control field 02060naaaa2200277uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/38106
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781420059137
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1201/9781420059137
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
072 #7 - SUBJECT CATEGORY CODE
Subject category code TBN
Source bicssc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Paik, Ungyu
Relationship auth
245 10 - TITLE STATEMENT
Title Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. Taylor & Francis
Date of publication, distribution, etc. 20090220
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction Creative Commons
Use and reproduction rights https://creativecommons.org/licenses/by-nc-nd/4.0/legalcode
Source of term cc
-- https://creativecommons.org/licenses/by-nc-nd/4.0/legalcode
546 ## - LANGUAGE NOTE
Language note English
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Nanotechnology
Source of heading or term bicssc
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Material Sciences
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Park, Jea-Gun
Relationship auth
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf">https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf">https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf">https://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/38106">https://directory.doabooks.org/handle/20.500.12854/38106</a>
Access status 0
Public note DOAB: description of the publication

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