Micromachining Techniques for Fabrication of Micro and Nano Structures (Record no. 64609)

MARC details
000 -LEADER
fixed length control field 02208naaaa2200301uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/65516
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220220041740.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1364
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789533079066
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535160953
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.5772/1364
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
072 #7 - SUBJECT CATEGORY CODE
Subject category code PN
Source bicssc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Kahrizi, Mojtaba
Relationship edt
245 10 - TITLE STATEMENT
Title Micromachining Techniques for Fabrication of Micro and Nano Structures
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. IntechOpen
Date of publication, distribution, etc. 2012
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (314 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction Creative Commons
Use and reproduction rights https://creativecommons.org/licenses/by/3.0/
Source of term cc
-- https://creativecommons.org/licenses/by/3.0/
546 ## - LANGUAGE NOTE
Language note English
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Chemistry
Source of heading or term bicssc
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Analytical chemistry
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Kahrizi, Mojtaba
Relationship oth
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://mts.intechopen.com/storage/books/854/authors_book/authors_book.pdf">https://mts.intechopen.com/storage/books/854/authors_book/authors_book.pdf</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/65516">https://directory.doabooks.org/handle/20.500.12854/65516</a>
Access status 0
Public note DOAB: description of the publication

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