Development of CMOS-MEMS/NEMS Devices (Record no. 78408)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 04074naaaa2200877uu 4500 |
| 001 - CONTROL NUMBER | |
| control field | https://directory.doabooks.org/handle/20.500.12854/44945 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220220092246.0 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | books978-3-03921-069-5 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783039210695 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783039210688 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.3390/books978-3-03921-069-5 |
| Terms of availability | doi |
| 041 0# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | English |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | dc |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Verd, Jaume |
| Relationship | auth |
| 245 10 - TITLE STATEMENT | |
| Title | Development of CMOS-MEMS/NEMS Devices |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | MDPI - Multidisciplinary Digital Publishing Institute |
| Date of publication, distribution, etc. | 2019 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 electronic resource (165 p.) |
| 506 0# - RESTRICTIONS ON ACCESS NOTE | |
| Terms governing access | Open Access |
| Source of term | star |
| Standardized terminology for access restriction | Unrestricted online access |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).] |
| 540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE | |
| Terms governing use and reproduction | Creative Commons |
| Use and reproduction rights | https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| Source of term | cc |
| -- | https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| 546 ## - LANGUAGE NOTE | |
| Language note | English |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | encapsulation |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | n/a |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | NEM memory switch |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | magnetotransistor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | gas sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | nano-system array |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | metal oxide (MOX) sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | capacitive pressure sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | real-time temperature compensation loop |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | mechanical relays |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | single-crystal silicon (SC-Si) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS relays |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | oscillator |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | micro-electro-mechanical system (MEMS) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | uncooled IR-bolometer |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | microelectromechanical systems |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | microbolometer |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | programmable sustaining amplifier |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | micro sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | CMOS-MEMS |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | pierce oscillator |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS resonators |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | micro/nanoelectromechanical systems (MEMS/NEMS) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | resonator |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | microhotplate |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | NEMS |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | application-specific integrated circuit (ASIC) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS modelling |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | magnetic field |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | chopper instrumentation amplifier |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | microresonators |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | interface circuit |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Hall effect |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | thermal detector |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | temperature sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | infrared sensor |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | CMOS–NEMS |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | CMOS |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | atomic force microscope |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS switches |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | stent |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | micro-electro-mechanical systems (MEMS) sensors |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | nano resonator |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | silicon-on-insulator (SOI) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS-ASIC integration |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Sigma-Delta |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MEMS characterization |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | high-Q capacitive accelerometer |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | mass sensors |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | M3D |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Segura, Jaume |
| Relationship | auth |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Host name | www.oapen.org |
| Uniform Resource Identifier | <a href="https://mdpi.com/books/pdfview/book/1387">https://mdpi.com/books/pdfview/book/1387</a> |
| Access status | 0 |
| Public note | DOAB: download the publication |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Host name | www.oapen.org |
| Uniform Resource Identifier | <a href="https://directory.doabooks.org/handle/20.500.12854/44945">https://directory.doabooks.org/handle/20.500.12854/44945</a> |
| Access status | 0 |
| Public note | DOAB: description of the publication |
No items available.