Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
Material type:
ArticleLanguage: German Publication details: KIT Scientific Publishing 2013Description: 1 electronic resource (XVI, 133 p. p.)ISBN: - KSP/1000036845
- 9783731501190
Open Access star Unrestricted online access
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm.
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German
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