Koch, Frieder Johannes <br/><br/>
X-ray optics made by X-ray lithography: Process optimization and quality control 

 -  KIT Scientific Publishing  2017 
 - 1 electronic resource (X, 138 p. p.) 
<br/><br/> Open Access 
<br/><br/> Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work. 
<br/><br/><br/>Creative Commons 
<br/><br/><br/>English 
<br/><br/><label>ISBN: </label>KSP/1000070029 9783731506799 
<br/><br/><label>Standard No.: </label>10.5445/KSP/1000070029  doi 
<br/><br/><label>Subjects--Index Terms: </label>Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik