TY  - GEN
AU  - Koch,Frieder Johannes
TI  - X-ray optics made by X-ray lithography: Process optimization and quality control
SN  - KSP/1000070029
PY  - 2017///
PB  - KIT Scientific Publishing
KW  - Talbot effect
KW  - Röntgengitter
KW  - LIGA
KW  - X-ray optics
KW  - Phasenkontrast
KW  - Talbot-Effect
KW  - phase contrast
KW  - X-ray gratings
KW  - Röntgenoptik
N1  - Open Access
N2  - Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work
UR  - https://www.ksp.kit.edu/9783731506799
UR  - https://directory.doabooks.org/handle/20.500.12854/62856
ER  -