TY  - GEN
AU  - Mark Goorsky
TI  - Ion Implantation
SN  - 1881
PY  - 2012///
PB  - IntechOpen
KW  - Physical Sciences
KW  - Engineering and Technology
KW  - Materials Science
KW  - Semiconductor
KW  - Thermal Engineering
N1  - Open Access
N2  - Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book
UR  - https://www.intechopen.com/books/ion-implantation
UR  - https://directory.doabooks.org/handle/20.500.12854/50660
ER  -