Advances in Unconventional Lithography
Material type:
ArticleLanguage: English Publication details: IntechOpen 2011Description: 1 electronic resource (200 p.)ISBN: - 1800
- 9789533076072
- 9789535155966
Open Access star Unrestricted online access
The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography.
Creative Commons https://creativecommons.org/licenses/by/3.0/ cc https://creativecommons.org/licenses/by/3.0/
English
There are no comments on this title.
