| 000 | 01735naaaa2200349uu 4500 | ||
|---|---|---|---|
| 001 | https://directory.doabooks.org/handle/20.500.12854/62856 | ||
| 005 | 20220219213239.0 | ||
| 020 | _aKSP/1000070029 | ||
| 020 | _a9783731506799 | ||
| 024 | 7 |
_a10.5445/KSP/1000070029 _cdoi |
|
| 041 | 0 | _aEnglish | |
| 042 | _adc | ||
| 100 | 1 |
_aKoch, Frieder Johannes _4auth |
|
| 245 | 1 | 0 | _aX-ray optics made by X-ray lithography: Process optimization and quality control |
| 260 |
_bKIT Scientific Publishing _c2017 |
||
| 300 | _a1 electronic resource (X, 138 p. p.) | ||
| 506 | 0 |
_aOpen Access _2star _fUnrestricted online access |
|
| 520 | _aGrating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work. | ||
| 540 |
_aCreative Commons _fhttps://creativecommons.org/licenses/by-sa/4.0/ _2cc _4https://creativecommons.org/licenses/by-sa/4.0/ |
||
| 546 | _aEnglish | ||
| 653 | _aTalbot effect | ||
| 653 | _aRöntgengitter | ||
| 653 | _aLIGA | ||
| 653 | _aX-ray optics | ||
| 653 | _aPhasenkontrast | ||
| 653 | _aTalbot-Effect | ||
| 653 | _aphase contrast | ||
| 653 | _aX-ray gratings | ||
| 653 | _aRöntgenoptik | ||
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://www.ksp.kit.edu/9783731506799 _70 _zDOAB: download the publication |
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://directory.doabooks.org/handle/20.500.12854/62856 _70 _zDOAB: description of the publication |
| 999 |
_c45126 _d45126 |
||