| 000 | 02244naaaa2200301uu 4500 | ||
|---|---|---|---|
| 001 | https://directory.doabooks.org/handle/20.500.12854/65337 | ||
| 005 | 20220219223550.0 | ||
| 020 | _a859 | ||
| 020 | _a9789533076027 | ||
| 020 | _a9789535155546 | ||
| 024 | 7 |
_a10.5772/859 _cdoi |
|
| 041 | 0 | _aEnglish | |
| 042 | _adc | ||
| 072 | 7 |
_aPHFC _2bicssc |
|
| 100 | 1 |
_aCui, Bo _4edt |
|
| 700 | 1 |
_aCui, Bo _4oth |
|
| 245 | 1 | 0 | _aRecent Advances in Nanofabrication Techniques and Applications |
| 260 |
_bIntechOpen _c2011 |
||
| 300 | _a1 electronic resource (628 p.) | ||
| 506 | 0 |
_aOpen Access _2star _fUnrestricted online access |
|
| 520 | _aNanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography. | ||
| 540 |
_aCreative Commons _fhttps://creativecommons.org/licenses/by/3.0/ _2cc _4https://creativecommons.org/licenses/by/3.0/ |
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| 546 | _aEnglish | ||
| 650 | 7 |
_aCondensed matter physics (liquid state & solid state physics) _2bicssc |
|
| 653 | _aCondensed matter physics (liquid state & solid state physics) | ||
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://mts.intechopen.com/storage/books/334/authors_book/authors_book.pdf _70 _zDOAB: download the publication |
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://directory.doabooks.org/handle/20.500.12854/65337 _70 _zDOAB: description of the publication |
| 999 |
_c48365 _d48365 |
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