| 000 | 02208naaaa2200301uu 4500 | ||
|---|---|---|---|
| 001 | https://directory.doabooks.org/handle/20.500.12854/65516 | ||
| 005 | 20220220041740.0 | ||
| 020 | _a1364 | ||
| 020 | _a9789533079066 | ||
| 020 | _a9789535160953 | ||
| 024 | 7 |
_a10.5772/1364 _cdoi |
|
| 041 | 0 | _aEnglish | |
| 042 | _adc | ||
| 072 | 7 |
_aPN _2bicssc |
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| 100 | 1 |
_aKahrizi, Mojtaba _4edt |
|
| 700 | 1 |
_aKahrizi, Mojtaba _4oth |
|
| 245 | 1 | 0 | _aMicromachining Techniques for Fabrication of Micro and Nano Structures |
| 260 |
_bIntechOpen _c2012 |
||
| 300 | _a1 electronic resource (314 p.) | ||
| 506 | 0 |
_aOpen Access _2star _fUnrestricted online access |
|
| 520 | _aMicromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. | ||
| 540 |
_aCreative Commons _fhttps://creativecommons.org/licenses/by/3.0/ _2cc _4https://creativecommons.org/licenses/by/3.0/ |
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| 546 | _aEnglish | ||
| 650 | 7 |
_aChemistry _2bicssc |
|
| 653 | _aAnalytical chemistry | ||
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://mts.intechopen.com/storage/books/854/authors_book/authors_book.pdf _70 _zDOAB: download the publication |
| 856 | 4 | 0 |
_awww.oapen.org _uhttps://directory.doabooks.org/handle/20.500.12854/65516 _70 _zDOAB: description of the publication |
| 999 |
_c64609 _d64609 |
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