X-ray optics made by X-ray lithography: Process optimization and quality control
Koch, Frieder Johannes
X-ray optics made by X-ray lithography: Process optimization and quality control - KIT Scientific Publishing 2017 - 1 electronic resource (X, 138 p. p.)
Open Access
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Creative Commons
English
KSP/1000070029 9783731506799
10.5445/KSP/1000070029 doi
Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik
X-ray optics made by X-ray lithography: Process optimization and quality control - KIT Scientific Publishing 2017 - 1 electronic resource (X, 138 p. p.)
Open Access
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Creative Commons
English
KSP/1000070029 9783731506799
10.5445/KSP/1000070029 doi
Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik