X-ray optics made by X-ray lithography: Process optimization and quality control

By: Material type: ArticleArticleLanguage: English Publication details: KIT Scientific Publishing 2017Description: 1 electronic resource (X, 138 p. p.)ISBN:
  • KSP/1000070029
  • 9783731506799
Subject(s): Online resources: Summary: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Item type:
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
No physical items for this record

Open Access star Unrestricted online access

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

Creative Commons https://creativecommons.org/licenses/by-sa/4.0/ cc https://creativecommons.org/licenses/by-sa/4.0/

English

There are no comments on this title.

to post a comment.
Share