Ion Implantation (Record no. 61240)

MARC details
000 -LEADER
fixed length control field 01553naaaa2200313uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/50660
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220220030547.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1881
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535142928
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789535106340
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.5772/1881
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Mark Goorsky
Relationship auth
245 10 - TITLE STATEMENT
Title Ion Implantation
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. IntechOpen
Date of publication, distribution, etc. 2012
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (450 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc. Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction All rights reserved
-- http://oapen.org/content/about-rights
546 ## - LANGUAGE NOTE
Language note English
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Physical Sciences
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Engineering and Technology
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Materials Science
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Semiconductor
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Thermal Engineering
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://www.intechopen.com/books/ion-implantation">https://www.intechopen.com/books/ion-implantation</a>
Access status 0
Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/50660">https://directory.doabooks.org/handle/20.500.12854/50660</a>
Access status 0
Public note DOAB: description of the publication

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